Community Research and Development Information Service - CORDIS

Programme funding

EUR 167,1 million
- Intensification of the collaboration between business and science in order to transform research results into marketable products rapidly.
- Early participation of small and medium-sized companies in the research programmes.
- The flexibilization of the German system of scientific study and research by way of additional development of its structures in order to maximize the effect of the research funds used.

Abstract

National programme for mikro- and nanoelectronics with a separate focus on nanotechnology

Subdivision

New processes for structuring nano-components; optical lithography based on 157 nm UV-laser light; development of mask-technology for nano-lithography; extrem UV

Implementation

Funding rate 50 %; cooperation between research institutions and industry essential

Remarks

Nanotechnologies
Record Number: 788 / Last updated on: 2014-03-05