Objective
Micro- and nanoelectromechanical system (MEMS and NEMS) components are vital for many industrial and consumer products such as airbag systems in cars and motion controls in mobile phones, and many of these MEMS and NEMS enabled applications have a large impact on European industry and society. However, the potential of MEMS and NEMS is being critically hampered by their dependence on integrated circuit (IC) manufacturing technologies. Most micro- and nano-manufacturing methods have been developed by the IC industry and are characterized by highly standardized manufacturing processes that are adapted for extremely large production volumes of more than 10.000 wafers per month. In contrast, the vast majority of MEMS and NEMS applications only demands production volumes of less than 100 wafers per month in combination with different non-standardized manufacturing and integration processes for each product. If a much wider variety of diverse and even low-volume MEMS and NEMS products shall be exploited, the semiconductor manufacturing paradigm has to be broken. In this project, we therefore will focus on frontier research on new paradigms for flexible and cost-efficient manufacturing and integration of MEMS and NEMS within three related research areas:
(1) Wafer-Level Heterogeneous Integration for MEMS and NEMS, where we explore new and improved wafer-level heterogeneous integration technologies for MEMS and NEMS devices;
(2) Integration of Materials into MEMS Using High-Speed Wire Bonding Tools, where we explore new ways of integrating various types of wire materials into MEMS devices;
(3) Free-Form 3D Printing of Mono-Crystalline Silicon Micro- and Nanostructures, where we explore entirely novel ways of implementing mono-crystalline silicon MEMS and NEMS structures that can be arbitrarily shaped.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- engineering and technology nanotechnology nanoelectromechanical systems
- engineering and technology electrical engineering, electronic engineering, information engineering information engineering telecommunications mobile phones
- natural sciences chemical sciences inorganic chemistry metalloids
- engineering and technology mechanical engineering manufacturing engineering additive manufacturing
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
ERC-2011-StG_20101014
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Host institution
100 44 Stockholm
Sweden
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.