DIAMEMSProject reference: 300883
Funded under :
Microelectromechanical Systems from Nanocrystalline Diamond
Total cost:EUR 270 145,8
EU contribution:EUR 270 145,8
Coordinated in:United Kingdom
Topic(s):FP7-PEOPLE-2011-IEF - Marie-Curie Action: "Intra-European fellowships for career development"
Call for proposal:FP7-PEOPLE-2011-IEFSee other projects for this call
Funding scheme:MC-IEF - Intra-European Fellowships (IEF)
"This project aims to develop high frequency, high quality factor micro and nano – electromechanical systems (MEMS) from nanocrystalline diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young’s modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials. High performance NCD growth and planarization will be optimised for MEMS applications. The realisation of continuous, smooth (<1nm rms over 1µm), pin hole free NCD over large areas exhibiting bulk diamond properties will enable a multitude of applications at drastically reduced cost to currently available bulk diamond technologies. The resulting material will have applications outside the MEMS field such as in tribology, optical coatings, electrochemical electrodes (when doped with boron), heat spreading etc. The development of clean room processing technologies of NCD will allow the fabrication of new devices and result in new ideas exploiting this novel material."
EU contribution: EUR 270 145,8
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