Community Research and Development Information Service - CORDIS

FP7 Nanoheat - logo

NANOHEAT

Project reference: 318625
Funded under: FP7-ICT

MultidomaiN plAtform for iNtegrated MOre-tHan-MoorE/Beyond CMOS systems charActerisation & diagnosTics [Print to PDF] [Print to RTF]

From 2012-10-01 to 2015-09-30

Project details

Total cost:

EUR 5 814 277

EU contribution:

EUR 3 995 000

Coordinated in:

Poland

Call for proposal:

FP7-ICT-2011-8

Funding scheme:

CP - Collaborative project (generic)

Develop, deliver and validate a miniaturized and integrated platform for advanced thermal, electrical and chemical analysis at the nanoscale.

The principle goal of the NANOHEAT project is to develop, deliver and validate a miniaturized and integrated platform which provides a multidimensional nanoprobing platform for advanced thermal analysis at the nanoscale. For advanced nano-devices or Beyond-CMOS structures (sub-40nm transistors, SETs, graphene structures etc.) there is a deep shortage of versatile, multidomain tools capable of analysing phenomena occurring at a nanoscale. The family of AFM-based techniques provides various nanoscale observation capabilities restricted however to dedicated, particular phenomena. Moreover, available AFM systems do not allow for easy "domain-mixing" as well as for combination of large distance and nanoscale positioning precision. These techniques are not useful as in-line monitoring tools. The multi-functional system of independently controlled AFM-based nanoprobes, equipped with dedicated (FIB functionalized) tips and actuators that is developed within the NANOHEAT project, will allow for multi-domain diagnostics of nanoelectronic, nanophotonic and bio-electronic devices. The proposed system will allow to observe thermal, electrical (e.g. potential) or even chemical (e.g. electrochemical) properties at the nanoscale. It will also have in-line (on wafer) diagnostics capabilities. The consortium is composed of three R&D institutes, four university teams and two SMEs providing a mixture of a complementary expertise related to micro-engineering, design and technology of micro/nano-devices and systems, design and manufacturing of measurement and control electronics, modelling and simulation, material science and physics. Besides, four partners have expertise and potential required for validation of the developed system for specific applications. In addition the coordinator of the project, ITE is a leading Polish research centre active in the micro/nanoelectronic, micro/nano-system and photonic domains.

Objective

For advanced nano-devices or Beyond-CMOS structures (sub-40nm transistors, SETs, graphene structures etc.) there is a deep shortage of versatile, multidomain tools capable of analysing phenomena occurring at a nanoscale. The family of AFM-based techniques provides a various nanoscale observation capabilities restricted however to dedicated, particular phenomena. Moreover, available AFM systems do not allow for easy "domain-mixing" as well as for combination of large distance and nanoscale positioning precision. These techniques are not useful as a in-line monitoring tools.The principle goal of the NANOHEAT project is to develop, deliver and validate a miniaturized and integrated platform which provides a multidimensional nanoprobing platform for advanced thermal analysis at the nanoscale. The multi-functional system of independently controlled AFM-based nanoprobes, equipped with dedicated (FIB functionalized) tips and actuators will allow for multi-domain diagnostics of nanoelectronic, nanophotonic and bio-electronic devices. The proposed system will allow to observe thermal, electrical (e.g. potential) or even chemical (e.g. electrochemical) properties at the nanoscale. It will also have in-line (on wafer) diagnostics capabilities.The consortium is composed of 3 R&D institutes, 4 university teams and 2 SMEs providing a mixture of a complementary expertise related to micro-engineering, design and technology of micro/nano-devices and systems, design and manufacturing of measurement and control electronics, modelling and simulation, material science and physics. Besides, four partners has an expertise and potential required for validation of the developed system for specific applications. The Coordinator, ITE is a leading Polish research centre active in the micro/nanoelectronic, micro/nano-system and photonic domains.

Related information

Open Access

Coordinator

INSTYTUT TECHNOLOGII ELEKTRONOWEJ
Poland
al. Lotnikow 32/46
WARSZAWA, Poland
Administrative contact: Alina Kalicińska
Tel.: +48 22 716 59 90
Fax: +48 22 716 59 91
E-mail

Participants

IMINA TECHNOLOGIES SA
Switzerland
CHEMIN DE LA RAYE 13
ECUBLENS, Switzerland
Administrative contact: Guillaume Boetsch
Tel.: +41225349079
E-mail
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
Switzerland
BATIMENT CE 3316 STATION 1
LAUSANNE, Switzerland
Administrative contact: Adrian Ionescu
Tel.: +41 21 693 3979
Fax: +41 21 693 35 83
E-mail
IBM RESEARCH GMBH
Switzerland
SAEUMERSTRASSE 4
RUESCHLIKON, Switzerland
Administrative contact: Catherine Trachsel
Tel.: +41 44 724 8289
E-mail
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V
Germany
HANSASTRASSE 27C
MUNCHEN, Germany
Administrative contact: Christoph Schulte
Tel.: +49 89 1205 2728
Fax: +49 89 1205 7534
E-mail
CARL ZEISS SMS GMBH
Germany
CARL-ZEISS-PROMENADE 10
JENA, Germany
Administrative contact: Klaus Edinger
Tel.: +496154803836
Fax: +496154803880
E-mail
TECHNISCHE UNIVERSITAET ILMENAU
Germany
EHRENBERGSTRASSE 29
ILMENAU, Germany
Administrative contact: Thomas MIROW
Tel.: +49 3677 69 2555
Fax: +49 3677 69 1596
E-mail
UNIVERSITE DE FRANCHE-COMTE
France
CLAUDE GOUDIMEL 1
BESANCON, France
Administrative contact: Pauline Fournier
Tel.: +33 3 81 66 58 14
E-mail
POLITECHNIKA WROCLAWSKA
Poland
WYBRZEZE WYSPIANSKIEGO 27
WROCLAW, Poland
Administrative contact: Teodor Gotszalk
Tel.: +48 71 320 3202
Fax: +48713204299
E-mail
UNIVERSITE DE TECHNOLOGIE DE BELFORT MONTBELIARD
France
SITE DE BELFORT, 2EME ETAGE
BELFORT, France
Administrative contact: Arnaud MARCHANT
Tel.: +33 3 84 58 35 44
E-mail
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Rue Michel -Ange 3
PARIS, France
Administrative contact: Nathalie APPEL
Tel.: +33 383 856 085
Fax: +33 383 174 621
E-mail
Record Number: 105052 / Last updated on: 2014-10-14