Service Communautaire d'Information sur la Recherche et le Développement - CORDIS

FP6

NANOPLASMA

Project ID: 16424
Financé au titre de

Plasma Etching for desired nano-Feature shape and nano-texture: An Advanced Reactor and Simulation Software for Feedback-Loop Plasma Control

De 2006-04-01 à 2009-03-31

Détails concernant le projet

Coût total:

EUR 2 478 000

Contribution de l'UE:

EUR 1 580 000

Coordonné à/au(x)/en:

United Kingdom

Appel à propositions:

FP6-2004-IST-NMP-2See other projects for this call

Régime de financement:

STREP - Specific Targeted Research Project

Objectif

Coordinateur

OXFORD INSTRUMENTS PLASMA TECHNOLOGY LTD
United Kingdom
Old Station Way, Eynsham
WITNEY OXFORDSHIRE
United Kingdom
See on map
Contact administratif: Mike COOKE
Tél.: +44-1934837000
Fax: +44-1934837001
E-mail

Participants

TECHNISCHE UNIVERSITAET ILMENAU
Germany
Max-Planck-Ring 14
100565 ILMENAU
Germany
See on map
Contact administratif: Ivo RANGELOW
Tél.: +49-3677693718
Fax: +49-3677693132
E-mail
DUBLIN CITY UNIVERSITY
Ireland
Glasvenin
DUBLIN
Ireland
See on map
Contact administratif: Stephen DANIELS
Tél.: +353-017007639
Fax: +353-018360830
E-mail
NATIONAL CENTER FOR SCIENTIFIC RESEARCH "DEMOKRITOS"
Greece
Terma (End of Street) Patriarchou Gregoriou Str.
P.O. Box 60228 AGHIA PARASKEVI
Greece
Contact administratif: Evangelos GOGOLIDES
Tél.: +30-2106503237
Fax: +30-2106511723
E-mail
S3SOLUTIONS GMBH
Germany
Sollachweg 9
WESSLING
Germany
See on map
Contact administratif: Alexander PETRASCHENKO
Tél.: +49-1739072588
Fax: +49-81539089879
E-mail
ISMA LTD
Bulgaria
Samokovsko Shosse 2
SOFIA
Bulgaria
Contact administratif: Peter STEFANOV
Tél.: +359-29790478
Fax: +359-29753017
E-mail