Objective
The CMOS industry relies on the capabilities of engineers to control atomic positions at sub-nm scale across several interfaces. The formation of abrupt interfaces is heavily dependent on the thermal budget during their formation and of any other subsequent thermal treatments during device fabrication. As device dimensions decrease, the thicknesses of all junctions and interfaces must be reduced so that they do not become the major fractional volume of the whole device. In that framework, ultra fast annealing is becoming a key technology to enable the fabrication of nano scaled devices.
In parallel to this evolution, CMOS technology has seen a materials revolution in recent years. The introduction of high-k dielectrics at 45 nm and of FINFET technology at 22nm extended the lifespan of devices reliant on Si channels. Replacing silicon with high-mobility channels such as Ge and InGaAs will be the next major materials revolution. Whatever the method used to co integrate SiGe and InGaAs, such materials are both very different from Si, in particular with respect to thermal treatments. Co-processing of SiGe pFET and InGaAs nFET is therefore extremely challenging. Device processing on InGaAs nFET should not exceed the allowed thermal budget that SiGe can withstand or vice-versa. Ultra fast annealing will therefore be a key technology to enable the co-integration of Ge and InGaAs.
We propose in this project to explore fast (ms) anneal of high-m channels as a generic vehicle to reduce the thermal budget of critical modules. We will in particular focus on InGaAs, as it is the less mature technology with respect to SiGe-based devices. The three main challenges for a successful integration of InGaAs-based MOSFETs in future VLSI technology are clearly identified: (i) fabrication of nanoscale InGaAs “patches”, the active channels, on silicon (ii) high capacitance, low interface state density gate dielectric and (iii) low contact and access resistance in the source/drain regions.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
- social sciences political sciences political transitions revolutions
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences chemical sciences inorganic chemistry metalloids
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP7-PEOPLE-2013-IEF
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
8803 RUESCHLIKON
Switzerland
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.