Servizio Comunitario di Informazione in materia di Ricerca e Sviluppo - CORDIS

Atom Probe Tomography (APT) Metrology for future 3D semiconductor devices

From 2015-08-01 to 2017-07-31, ongoing project

Project details

Total cost:

EUR 160 800

EU contribution:

EUR 160 800

Coordinated in:

Belgium

Call for proposal:

H2020-MSCA-IF-2014See other projects for this call

Funding scheme:

MSCA-IF-EF-ST - Standard EF

Objective

Related information

Open Access

Coordinator

INTERUNIVERSITAIR MICRO-ELECTRONICACENTRUM IMEC VZW
Belgium

EU contribution: EUR 160 800


KAPELDREEF 75
3001 LEUVEN
Belgium
Record Number: 195974 / Last updated on: 2015-06-24