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Content archived on 2024-06-18

Processes for MEMS by inkjet enhanced technologies

Objective

Prominent aims to incorporate inkjet printing as a part of the MEMS fabrication process. By using maskless, digitally controlled, localized additive processes instead of the subtractive processes used currently, selected steps in the MEMS manufacturing can be done with simplified process sequence. This will result in
• lower initial investment cost for a MEMS line
• greatly increased flexibility in production, allowing for smaller batches
• because of flexibility, easier prototyping and shorter time-to-market period in new devices
• new features in the MEMS device
• greatly reduced production costs, and
• reduced environmental impact due to dimished use of materials, chemicals and water
The process steps to be developed include via formation and fill, wafer bonding, formation of redistribution layers and deposition of functional materials in MEMS cavities. The project will develop new nanomaterial inks for the above purposes, and evaluate the cost effects of the new manufacturing methods.
Europe has had a strong position globally in MEMS manufacturing, but with the tightening competition the pressure for cost reductions is increasing. Prominent will develop a novel low-cost manufacturing methods that are needed to keep the production of MEMS profitable in Europe and open possibilities for increasing business for for MEMS manufacturers, but also for ink and printing equipment manufacturers.

Programme(s)

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Topic(s)

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Call for proposal

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ENIAC-2012-1
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Funding Scheme

Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Coordinator

OKMETIC OY
EU contribution
€ 137 408,00
Address
PIITIE 2
01510 Vantaa
Finland

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Region
Manner-Suomi Helsinki-Uusimaa Helsinki-Uusimaa
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

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Participants (9)

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