Objective The TAKE5 project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 10nm technology node and the ECSEL JU project SeNaTe aiming at the 7nm technology node. The main objective of the TAKE5 project is the demonstration of 5nm patterning in line with the industry needs and the ITRS roadmap in the Advanced Patterning Center at the imec pilot line using innovative design and technology co-optimization, layout and device architecture exploration, and comprising demonstration of a lithographic platform for EUV technology, advanced process and holistic metrology platforms and new materials.A lithography scanner will be developed based on EUV technology to achieve the 5nm module patterning specification. Metrology platforms need to be qualified for 5nm patterning of 1D, 2D and 3D geometries with the appropriate precision and accuracy. For the 5nm technology modules new materials will need to be introduced. Introduction of these new materials brings challenges for all involved deposition processes and the related equipment set. Next to new deposition processes also the interaction of the involved materials with subsequent etch steps will be studied. The project will be dedicated to find the best options for patterning. The project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets as set out in the MASP at the discovery of new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the nano-structuring of electronic devices with 5nm resolution in high-volume manufacturing and fast prototyping. The project touches the core of the continuation of Moore’s law which has celebrated its 50th anniversary and covers all aspects of 5nm patterning development. Fields of science engineering and technologyenvironmental engineeringenergy and fuelsrenewable energysocial scienceseconomics and businesseconomicsproduction economicsproductivityengineering and technologymechanical engineeringmechatronicsengineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensorsnatural sciencesphysical scienceselectromagnetism and electronicssemiconductivity Programme(s) H2020-EU.2.1.1. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT) Main Programme H2020-EU.2.1.1.7. - ECSEL Topic(s) ECSEL-15-2015 - Semicondutor Process, Equipment and Materials Call for proposal H2020-ECSEL-2015-2-IA-two-stage-Master See other projects for this call Sub call H2020-ECSEL-2015-2-IA-two-stage Funding Scheme ECSEL-IA - ECSEL Innovation Action Coordinator ASML NETHERLANDS B.V. Net EU contribution € 9 450 000,00 Address De run 6501 5504DR Veldhoven Netherlands See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 63 000 000,00 Participants (13) Sort alphabetically Sort by Net EU contribution Expand all Collapse all APPLIED MATERIALS ISRAEL LTD Israel Net EU contribution € 2 081 250,00 Address Oppenheimer street 9 76705 Rehovot See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 13 875 000,00 ASM BELGIUM NV Belgium Net EU contribution € 58 300,88 Address Kapeldreef 75 3001 Heverlee See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 388 672,50 COVENTOR SARL France Net EU contribution € 387 156,00 Address Avenue du quebec 3 91140 Villebon sur yvette See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Ile-de-France Ile-de-France Essonne Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 548 625,00 FEI ELECTRON OPTICS BV Netherlands Net EU contribution € 559 050,00 Address Achtseweg noord gebouw aae 5 5651 GG Eindhoven See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 3 727 000,00 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV Germany Net EU contribution € 123 268,50 Address Hansastrasse 27c 80686 Munchen See on map Region Bayern Oberbayern München, Kreisfreie Stadt Activity type Research Organisations Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 308 171,25 INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM Belgium Net EU contribution € 9 039 656,50 Address Kapeldreef 75 3001 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Research Organisations Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 22 599 141,25 BRUKER TECHNOLOGIES LTD Israel Net EU contribution € 447 317,48 Address 6 hamechkar street ramat gavriel industrial zone 2306990 Migdal haemek See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 4 415 000,00 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. Jordan Valley Semiconductors UK Ltd United Kingdom Net EU contribution € 173 532,52 Address Belmont business park belmont DH1 1TW Durham See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region North East (England) Tees Valley and Durham Durham CC Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 156 883,44 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. BRUKER AXS GMBH Germany Net EU contribution € 41 400,00 Address Ostliche rheinbruckenstrasse 49 76187 Karlsruhe See on map Region Baden-Württemberg Karlsruhe Karlsruhe, Stadtkreis Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 276 000,00 KLA-TENCOR CORPORATION (ISRAEL) Israel Net EU contribution € 901 379,40 Address Hatikshoret st. 23100 Migdal haemek See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 6 009 196,00 LAM RESEARCH BELGIUM Participation ended Belgium Net EU contribution € 1 706,25 Address Kapeldreef 75 3001 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 11 375,00 NOVA LTD Israel Net EU contribution € 1 500 000,00 Address 5 david fikes st 76100 Rehovot See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 10 000 000,00 CARL ZEISS SMT GMBH Germany Net EU contribution € 3 600 000,00 Address Rudolf eber strasse 2 73447 Oberkochen See on map Region Baden-Württemberg Stuttgart Ostalbkreis Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 24 000 000,00