Community Research and Development Information Service - CORDIS

FP7

E450LMDAP

Project ID: 621280
Funded under

European 450mm Lithography and Metrology Development for Advanced Patterning

From 2014-10-01 to 2017-10-01, ongoing project

Project details

Total cost:

EUR 459 306 457,73

EU contribution:

EUR 68 895 968,66

Coordinated in:

Netherlands

Call for proposal:

ENIAC-2013-2See other projects for this call

Funding scheme:

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Objective

Coordinator

ASML NETHERLANDS B.V.
Netherlands

EU contribution: EUR 15 516 436,45


DE RUN 6501
5504DR VELDHOVEN
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

Participants

AAE B.V.
Netherlands

EU contribution: EUR 75 484,18


GRASBEEMD 2
5700 AL HELMOND
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
PFEIFFER VACUUM
France

EU contribution: EUR 377 048,47


AVENUE DE BROGNY 98
74009 ANNECY
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS ISRAEL LTD
Israel

EU contribution: EUR 7 341 572,18


OPPENHEIMER STREET 9
76705 REHOVOT
Israel
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG
Germany

EU contribution: EUR 486 384,40


RAHNITZER ALLEE 9
01330 DRESDEN
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASM BELGIUM NV
Belgium

EU contribution: EUR 423 036


KAPELDREEF 75
3001 HEVERLEE
Belgium
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASML Belgium BVBA
Belgium

EU contribution: EUR 362 256,90


Kalmthoutsesteenweg 100
2919 Essen
Belgium
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASYS GmbH & Co. KG
Germany

EU contribution: EUR 250 119,49


Gottlob-Bauknecht-Str. 4
73614 SCHORNDORF
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Benchmark Electronics B.V.
Netherlands

EU contribution: EUR 252 060


Lelyweg 10
7602EA Almelo
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Berliner Glas KGaA, Herbert Kubatz GmbH & Co
Germany

EU contribution: EUR 3 277 793,27


Waldkraiburger Str. 5
12347 Berlin
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
ROBERT BOSCH GMBH
Germany

EU contribution: EUR 515 862,24


Robert-Bosch Platz 1
70839 GERLINGEN-SCHILLERHOEHE
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Bosch Rexroth B.V.
Netherlands

EU contribution: EUR 117 150


KRUISBROEKSESTRAAT 1
5281 RV BOXTEL
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SIOUX CCM BV
Netherlands

EU contribution: EUR 297 167,55


DE PINCKART 24
5674 CC NUENEN
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France

EU contribution: EUR 466 063,61


RUE LEBLANC 25
75015 PARIS 15
France
Activity type: Research Organisations
COVENTOR SARL
France

EU contribution: EUR 172 390,77


Avenue du Québec 3
91140 VILLEBON SUR YVETTE
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Entegris Cleaning Process (ECP) SAS
France

EU contribution: EUR 53 280,63


RUE DU ROCHER DE LORZIER 196
38430 MOIRANS
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Germany
Wilschdorfer Landstrasse 101
01109 Dresden
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Integrated Dynamics Engineering GmbH
Germany

EU contribution: EUR 1 468 220,10


Karl-Liebknecht-strasse 30
65479 Raunheim
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

EU contribution: EUR 631 151


KAPELDREEF 75
3001 LEUVEN
Belgium
Activity type: Research Organisations
Ippon Innovation
France

EU contribution: EUR 53 171,64


rue Poisson 4
31500 Toulouse
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Irmato Industrial Solutions Eindhoven BV
Netherlands

EU contribution: EUR 252 910,90


Marinus van Meelweg 24
5667 EN Eindhoven
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
BRUKER JV ISRAEL LTD
Israel

EU contribution: EUR 773 334,30


6 HAMECHKAR STREET RAMAT GAVRIEL INDUSTRIAL ZONE
2306990 MIGDAL HAEMEK
Israel
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
KLA-TENCOR CORPORATION (ISRAEL)
Israel

EU contribution: EUR 2 287 897,56


HATIKSHORET ST.
23100 MIGDAL HAEMEK
Israel
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
KMWE Systems eindhoven B.V.
Netherlands

EU contribution: EUR 485 070,14


Croy 11
5653LC EINDHOVEN
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS
France

EU contribution: EUR 59 173,49


RUE MICHEL ANGE 3
75794 PARIS
France
Activity type: Research Organisations
Nanomotion Ltd.
Israel

EU contribution: EUR 405 951,16


Hayetzira 3
20692 Yoqneam
Israel
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Neways Technologies B.V.
Netherlands

EU contribution: EUR 252 496,58


SCIENCE PARK EINDHOVEN 5010
5692 EA SON
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel

EU contribution: EUR 1 601 196,85


WEIZMANN SCIENCE PARK BUILDING 22
76100 REHOVOT
Israel
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Oxford Instruments Nanotechnology Tools Ltd
United Kingdom

EU contribution: EUR 162 015


TUBNEY WOODS
OX13 5QX ABINGDON
United Kingdom
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
PRODRIVE TECHNOLOGIES BV
Netherlands

EU contribution: EUR 285 951


SCIENCE PARK EINDHOVEN 5501
5692 EM SON
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
RECIF TECHNOLOGIES
France

EU contribution: EUR 45 207,21


rue des briquetiers 9
31700 Blagnac
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
REDEN B.V.
Netherlands

EU contribution: EUR 58 363,23


F HAZEMEIJERSTRAAT 800
7555 RJ HENGELO OV
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SEGULA Technologies Nederland B.V.
Netherlands

EU contribution: EUR 66 286,50


High Tech Campus 9
5656 AE EINDHOVEN
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SemiLev GmbH
Germany

EU contribution: EUR 65 440,81


Industriering 7
63868 GROSSEWALLSTADT
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
STMICROELECTRONICS CROLLES 2 SAS
France

EU contribution: EUR 616 580,99


RUE JEAN MONNET 850
38920 CROLLES
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands

EU contribution: EUR 798 485,46


ANNA VAN BUERENPLEIN 1
2595 DA DEN HAAG
Netherlands
Activity type: Other
Toppan Photomasks Germany GmbH
Germany

EU contribution: EUR 590 481,89


Raehnitzer Allee 9
01109 Dresden
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
TECHNISCHE UNIVERSITEIT DELFT
Netherlands

EU contribution: EUR 206 394,30


STEVINWEG 1
2628 CN DELFT
Netherlands
Activity type: Higher or Secondary Education Establishments
VDL Enabling Technologies Group Eindhoven B.V.
Netherlands

EU contribution: EUR 10 373 342,79


ACHTSEWEG NOORD 5 AK-1 K113 -
5651 GG EINDHOVEN
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Carl Zeiss SMS GmbH
Germany

EU contribution: EUR 300 202,79


CARL-ZEISS-PROMENADE 10
07745 JENA
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Carl Zeiss SMT GmbH
Germany

EU contribution: EUR 16 653 951,47


Maale Camon 44
21613 Karmiel
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Record Number: 210444 / Last updated on: 2017-05-30
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