Objectif The aim of the project is to further advance the technological and theorical basis if Si micromechanics in order to fully exploit its potential for new applications, thereby creating the foundation for a new industry. A number of achievements have been obtained:experiments with dry and wet chemistries show that the required deliverable depths can be obtained;some microstructures stress compensation techniques have been determined;development of sensor simulation packages is in progress.This project set out to investigate specific areas that will contribute to the building blocks necessary for the development of Si based sensors for monitoring pressure acceleration, etc> The project will provide the elements needed for : 1. fabricating micromechanical structures with high aspect ratios and compensated for stress. The experiment will determine the best masking material for etching. Various techniques for the stress compensation in dielectric and semiconductor layers will be studied; 2. developing devices with freely movable silicon parts, which can be used for the realization of micromechanical sensors and actuators; 3. allowing the prediction of the behaviour of micromechanical devices using the software packages and simulations. The state and dynamic behaviour of cantilevers, bridges and plates and he influence of temperature on such structures will be considered. Champ scientifique engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensorsnatural sciencesphysical scienceselectromagnetism and electronicssemiconductivitynatural scienceschemical sciencesinorganic chemistrymetalloidsnatural sciencescomputer and information sciencessoftwaresoftware applicationssimulation software Programme(s) FP2-BRITE/EURAM 1 - Specific research and technological development programme (EEC) in the fields of industrial manufacturing technologies and advanced materials applications (BRITE/EURAM), 1989-1992 Thème(s) Data not available Appel à propositions Data not available Régime de financement Data not available Coordinateur Schlumberger Industries SA Contribution de l’UE Aucune donnée Adresse 50 avenue Jean Jaurès 92542 Montrouge France Voir sur la carte Coût total Aucune donnée Participants (4) Trier par ordre alphabétique Trier par contribution de l’UE Tout développer Tout réduire Chambre de Commerce et d'Industrie de Paris (CCIP) France Contribution de l’UE Aucune donnée Adresse 2 boulevard Blaise Pascal 93162 NOISY-LE-GRAND Voir sur la carte Coût total Aucune donnée Consejo Superior de Investigaciones Cientificas Espagne Contribution de l’UE Aucune donnée Adresse Campus Universitat Auto. de Barcelona 08193 BELLATERRA Voir sur la carte Coût total Aucune donnée Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV (FhG) Allemagne Contribution de l’UE Aucune donnée Adresse Paul-Gerhardt-Allee 42 81245 München Voir sur la carte Coût total Aucune donnée Messerschmitt-Bölkow-Blohm GmbH (MBB) Allemagne Contribution de l’UE Aucune donnée Adresse 8000 MÜNCHEN Voir sur la carte Coût total Aucune donnée
