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Microfabrication with synchotron radiation

Ziel



The development of the LIGA-technology (a combination of deep lithography, microelectroplating and micromoulding processes) has opended the door for future miniaturisation in many fields. For the first time an inexpensive technique for mass production of high aspect ratio sub-micron microstructures is available. Therefore, miniaturisation will proceed in fields like sensor and actuator technology, optical, electrooptical, biomedical and fluid-dynamic engineering or integrated optics. This will have a greater impact on everyday life than the miniaturisation process in microelectronics. Unfortunately, LIGA technology is not yet used in Europe other than in Germany, while in the USA and Japan considerable efforts are being made to take over the leadership in this promising field. The objective of the proposed enlargement of the network is to link together western European microfabrication and synchrotron radiation research centres with corresponding Eastern European research institutes in order to transfer LIGA know-how from Germany throughout whole Europe. The Network will further allow institutes interested in this technology to become familiar with the use of synchrotron radiation and it will enable the combination of other microfabrication techniques with LIGA to enhance interdisciplinary approach. Since LIGA technology needs synchrotron radiation only in the first step of the production sequence, the use of this technology is not restricted to the regions in the vicinity of a synchrotron light source. The subsequent steps, which comprise replication and, possibly, mass production may be performed at any industrial site. The outcome of this network will not only enhance European competitiveness as a whole, but will also provide specific improvement in research activities and fabrication techniques in the less favoured regions involved. Technology transfer and interdisciplinary approaches to microfabrication will be implemented by the frequent exchange of researchers. At their host institutes scientists will participate in research work that will be related to microfabrication in a way that is determined by the specific expertise of the host institute. Simultaneously, interdisciplinary and combination of complementary techniques and capabilities will be enhanced by frequent meetings of the network members (6/a).

Programm/Programme

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Aufforderung zur Vorschlagseinreichung

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Finanzierungsplan

CSC - Cost-sharing contracts

Koordinator

INSTITUT FUER MIKROTECHNIK MAINZ GMBH
EU-Beitrag
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Adresse
CARL-ZEISS-STRASSE 18-20
55129 MAINZ
Deutschland

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Beteiligte (4)

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Letzte Aktualisierung: 21 September 1995

Mein Booklet

Permalink: https://cordis.europa.eu/project/id/CIPD940630/de

European Union, 2024