Community Research and Development Information Service - CORDIS

The Creation of a Software Tool for the Resist Heating Effect Correction in Electron Beam Lithography on the Base of Experimental Investigation and Verification

From 1995-04-01 to 1997-03-31

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Germany

Topic(s):

Funding scheme:

CSC - Cost-sharing contracts

Objective

Coordinator

AISS GmbH
Germany
Gotzinger Straße 46
81371 München
Germany
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Administrative contact: Thomas WAAS
Tel.: +49-89-74610212
Fax: +49-89-7254357
E-mail

Participants

Institute of Computer Systems
Slovakia
Bratislava
Slovakia
SET-SERVIS
Russia
Moscow
Russia
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