Community Research and Development Information Service - CORDIS

Nanolithography using chemically amplified resists

From 1996-01-01 to 1998-12-31 | NANCAR Website

Project details

Total cost:

EUR 1 730 200

EU contribution:

EUR 977 600

Coordinated in:

United Kingdom

Funding scheme:

CSC - Cost-sharing contracts

Objective

Coordinator

CCLRC Rutherford Appleton Laboratory (RAL)
United Kingdom
Chilton
OX11 0QX Didcot
United Kingdom
Administrative contact: Philip Doughty PREWETT
Tel.: +44-1235445159
Fax: +44-1235445706

Participants

Centro Studi E Laboratori Telecomunicazioni
Italy
Via G. Reiss Romoli 274
10148 Torino
Italy
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Administrative contact: Giancarlo MENEGHINI
Tel.: +39-11-2285350
Fax: +39-11-2285696
Institute of Microelectronics (Imel)
Greece
15310 Aghia Paraskevi
Greece
Administrative contact: Michael HATZAKIS
Tel.: +30-210-6540796
Fax: +30-210-6511723
Instituto diElettronica Dello Stato Solido del Consiglio Nazionale Delle Richerche
Italy
Via Ciento Romano 42
00156 Roma
Italy
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Administrative contact: Massimo GENTILI
Tel.: +39-06415221
Fax: +39-0641522220
SIGMA-C GmbH
Germany
Rosenheimer Landstraße 74
85521 Ottobrunn
Germany
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Administrative contact: Christian KALUS
Tel.: +49-896096051
Fax: +49-896098112
E-mail
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