Community Research and Development Information Service - CORDIS

Evaluation of a highly productive computer controlled microwave barrel ash system for IC fabrication

From 1995-12-08 to 1997-03-07

Project details

Total cost:

EUR 550 000

EU contribution:

EUR 275 000

Coordinated in:

Austria

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

Siemens Bauelemente Ohg
Austria
Siemensstrasse 2
9500 Villach
Austria
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Administrative contact: Michael SCHWARK
Tel.: +43-4242-305524
Fax: +43-4242-305401
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