Community Research and Development Information Service - CORDIS

European deep UV stepper assessment

From 1996-06-01 to 1998-02-28

Project details

Total cost:

EUR 6 620 000

EU contribution:

EUR 3 310 000

Coordinated in:

Belgium

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

Interuniversity Microelectronics Centre
Belgium
Kapeldreef 75
3001 Leuven
Belgium
See on map
Administrative contact: Luc VAN DEN HOVE
Tel.: +32-16-281323
Fax: +32-16-281214
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