Community Research and Development Information Service - CORDIS

Automated wet bench for critical pre-oxidation treatments for sub-half micron applications

From 1995-12-01 to 1997-10-31

Project details

Total cost:

EUR 2 500 000

EU contribution:

EUR 1 250 000

Coordinated in:

Italy

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

Sgs-Thomson Microelectronics
Italy
Via C. Olivetti 2
20041 Agrate Brianza
Italy
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Administrative contact: ALESSANDRI
Tel.: +39-396035852
Fax: +39-396035233
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