Community Research and Development Information Service - CORDIS

In line ellipsometer for thickness control

From 1996-04-01 to 1997-03-31

Project details

Total cost:

EUR 800 000

EU contribution:

EUR 400 000

Coordinated in:

Germany

Funding scheme:

OIF - Marie Curie actions-Outgoing International Fellowships

Objective

Coordinator

Smst Submicron Semiconductor Technologies
Germany
Schickardstrasse 25
71004 Boblingen
Germany
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Administrative contact: Martin HAFNER
Tel.: +49-7031184625
Fax: +49-7031185175
E-mail
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