Community Research and Development Information Service - CORDIS

Advanced polishing and planarization equipment

From 1996-04-01 to 1998-06-30

Project details

Total cost:

EUR 5 400 000

EU contribution:

EUR 2 700 000

Coordinated in:

Germany

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

Temic Telefunken Microelectronic Gmbh
Germany
Theresienstrasse 2
74072 Heilbronn
Germany
See on map
Administrative contact: Heinz-Achim HEFNER
Tel.: +49-7131672379
Fax: +49-7131672933
E-mail
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