Objectif For many of the processing steps in the manufacture of thin film microelectronic devices, plasma is the only way to generate the required active chemical species. In the processing of ultra-thin layers with steady-state plasma there are problems associated with charging and breakdown of dielectric layers. Pulsed plasmas offer a way to overcome these problems, but new methods are required for the monitoring and control of such plasmas. The aim of this proposal is to develop and test the new diagnostic instrumentation required for pulsed plasma processing. Time-resolving Langmuir probes and optical spectrometry will be developed to diagnose the plasma, and optical reflectrometry will be used to monitor the film growth. The test bed for the validation of these new techniques will be a pulsed laser deposition facility for the manufacture of SQUID magnetometers. However, this new instrumentation will find application in a wide variety of pulsed plasma processes. Champ scientifique engineering and technologymaterials engineeringcoating and filmsnatural sciencesphysical sciencesopticslaser physicspulsed lasers Programme(s) FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002" Thème(s) 1.1.3.-6. - RTD Activities of a Generic Nature : Measurements and Testing Appel à propositions Data not available Régime de financement CSC - Cost-sharing contracts Coordinateur RISOE NATIONAL LABORATORY Contribution de l’UE Aucune donnée Adresse 399,Frederiksborgvej 399 4000 ROSKILDE Danemark Voir sur la carte Coût total Aucune donnée Participants (4) Trier par ordre alphabétique Trier par contribution de l’UE Tout développer Tout réduire INTELLEMETRICS LTD Royaume-Uni Contribution de l’UE Aucune donnée Adresse 35 CABLE DEPOT ROAD FK15 0DE FALKIRK,LAURIESTON Voir sur la carte Coût total Aucune donnée SCIENTIFIC SYSTEMS LIMITED Irlande Contribution de l’UE Aucune donnée Adresse Unit 3, Howth Junction Business Park, Kilbarrack DUBLIN 5 Voir sur la carte Coût total Aucune donnée THALES S.A. France Contribution de l’UE Aucune donnée Adresse Domaine de Corbeville 91404 ORSAY Voir sur la carte Coût total Aucune donnée THE PROVOST, FELLOWS AND SCHOLARS OF THE COLLEGE OF THE HOLY AND UNDIVIDED TRINITY OF QUEEN ELIZABETH NEAR DUBLIN HEREINAFTER TRINITY COLLEGE DUBLIN Irlande Contribution de l’UE Aucune donnée Adresse Trinity College Dublin, College Green 2 DUBLIN Voir sur la carte Coût total Aucune donnée