Objectif CSP has developed a high resolution, superconducting EDX spectrometer as well as a mechanical, low temperature cooling system. The detector reaches an approximately ten times better energy resolution than conventional EDX. The cooling system allows reaching temperatures of 40mK, its operation is vibration free and can be completely automated. These features and the complete fluid gas free cooling system allow applications on SEMs in cleanroom environments, e.g. on Defect Review Stations. The superior performance makes the detector most suitable for small structure and particle analysis required in IC industry when feature sizes are shrinking as well as for light element analyses. That detector type has an enormous future potential. A participation in the assessment program would support an European equipment manufacturer to take a leading role in an emerging technology and would contribute to the creation of new high tech jobs.Objectives:Objectives are to demonstrate the equipment's capability to perform in a long term reliably in an industrial environment and to evaluate its enhanced capabilities for 0.18/0.15 µm applications and interconnect technology. Due to a superior performance compared to state of the art, the system will offer new solutions in surface analysis. Thus, it will be an issue to demonstrate how the system may contribute to shorter process development times and make quality control more efficient. The natural place for the system is failure analysis labs. Since currently small surface feature sizes are analysed with expensive and time intensive methods, it is an objective to evaluate the cost savings when microcalorimeter EDX is employed as well as other parameters related to economy, reliability, user friendliness and equipment effectiveness. It is another objective to demonstrate that the cooling system can run vibration free on FEGs and that its operation can be fully automated. These properties in addition with the mechanical cooling system which needs no fluid gases, allow the use in a production cleanroom environment, for which a concept for this inline application of the analytical equipment is developed.Work description:During the first 3 months phase the final target specifications will be determined and the initial equipment specifications demonstrated. In a second 4 months period the equipment will be assessed by running samples, which are difficult or impossible to be analysed with conventional EDX. These samples will be related to 0.18/0.15 µm, copper/interconnect and back end technology. The results will be compared to results obtained with other techniques. During that time period, parameters like reliability, productivity and repeatability will be evaluated. Beyond that, the instruments capability for future applications in process development and quality assurance routines will be evaluated and potential savings in time and cost estimated. Users are encouraged to propose product modifications, which may position the product even higher in the market. Additionally, CSP will implement some product improvements during an improvement period, followed by another performance assessment. In particular, a poly-capillary lenses system will be installed in order to improve count rates. Over the whole project, CSP and the users will disseminate results in the scope of regular and dedicated marketing activities. A final report and a work shop for potential future users will terminate the project.Milestones:After one month a report on the agreed assessment specifications and suitable metrics for the measurement of progress and performance will be submitted. After 3 months a report on the basic equipment specifications such as cool down times of the sensor, its temperature stability and vibration free operation will be prepared. After month 7 a report about on the preliminary results on equipment performance, reliability and potential to increase productivity including recommendation for improvements will be submitted. In the final report after 12 months the results for the optimised system will be summarised. Champ scientifique engineering and technologymechanical engineeringthermodynamic engineeringsocial scienceseconomics and businesseconomicsproduction economicsproductivityengineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensors Programme(s) FP5-IST - Programme for research, technological development and demonstration on a "User-friendly information society, 1998-2002" Thème(s) 1.1.2.-4.8.3 - Processes, equipment and materials Appel à propositions Data not available Régime de financement ACM - Preparatory, accompanying and support measures Coordinateur INFINEON TECHNOLOGIES AG Contribution de l’UE Aucune donnée Adresse ST. MARTIN STRASSE 53 81609 MUENCHEN Allemagne Voir sur la carte Coût total Aucune donnée Participants (1) Trier par ordre alphabétique Trier par contribution de l’UE Tout développer Tout réduire AMD SAXONY MANUFACTURING GMBH Allemagne Contribution de l’UE Aucune donnée Adresse WILSCHDORFER LANDSTRASSE 101 01109 DRESDEN Voir sur la carte Coût total Aucune donnée
