Community Research and Development Information Service - CORDIS

FP5

ATOL

Project ID: IST-1999-20363
Funded under

Atomic layer chemical vapour deposition for copper dual damascene interconnects

From 2000-10-01 to 2002-03-31 | ATOL Website

Project details

Total cost:

EUR 5 321 741

EU contribution:

EUR 2 415 010

Coordinated in:

Belgium

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Belgium
KAPELDREEF 75
3001 LEUVEN
Belgium
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Administrative contact: Gerald BEYER
Tel.: +32-16-281343
Fax: +32-16-281214
E-mail

Participants

ASM INTERNATIONAL N.V.
Netherlands
JAN VAN EYCKLAAN 10
3723 BC BILTHOVEN
Netherlands
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Administrative contact: Ivo RAAIJMAKERS
Tel.: +31-30-2298411
Fax: +31-30-2298533
E-mail
INFINEON TECHNOLOGIES AG
Germany
ST. MARTIN STRASSE 53
81609 MUENCHEN
Germany
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Administrative contact: Wolfgang ARDEN
Tel.: +49-89-23422463
Fax: +49-89-23424449
E-mail
PHILIPS RESEARCH
Netherlands
PROFESSOR HOLSTLAAN 4 (WAG14)
5656 AA EINDHOVEN
Netherlands
Administrative contact: Mart GRAEF
Tel.: +31-40-2744600
Fax: +31-40-2743390
E-mail
SONY CORPORATION
Japan
104G-7F, 1-14-1, ASAHI-CHO
243-0014 ASTUGI - KANAGAWA
Japan
Administrative contact: Takeshi NOGAMI
Tel.: +81-46-2305568
Fax: +81-46-2306556
E-mail
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