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Optical characterisation methods for mems manufacturing (OCMMM)

Objectif

While testing electrical properties in microsystems is a well-developed art the testing of mechanical properties of MicroElectroMechanical Systems (MEMS) is not. However, the micromechanical characterisation plays a crucial role, both during design and development of microstructures and during chip-production, assemblage and life cycles of the finished MEMS products.

Two different optical approaches are proposed to improve the MEMS testability, based on:
i) on-chip integrated techniques and;
ii) external full-field interferomety. The qualification and validation of proposed testability procedure is made by industrial driven demonstrations and application examples (data storage, microsensors for avionics). The OCMM proposal represents the European module of a world-wide cluster that is going to co-operate within an IMS action, where an interdisciplinary and industry-led consortium has been formed.

Mots‑clés

Appel à propositions

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Régime de financement

CSC - Cost-sharing contracts

Coordinateur

UNIVERSITÉ DE FRANCHE-COMTÉ
Contribution de l’UE
Aucune donnée
Adresse
Route de Gray 16
25030 BESANCON
France

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Coût total
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Participants (10)