Community Research and Development Information Service - CORDIS

The development of a Silicon Linewidth Standard

From 1992-11-01 to 1996-10-31

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Germany

Topic(s):

Funding scheme:

CSC - Cost-sharing contracts

Objective

Coordinator

Physikalisch-Technische Bundesanstalt
Germany
Bundesallee 100
3300 Braunschweig
Germany
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Administrative contact: Werner MIRANDE
Tel.: +49-531-5924220
Fax: +49-531-5929292

Participants

Interuniversitair Mikro-Electronika Centrum VZW
Belgium
Kapeldreef 75
3001 HEVERLEE
Belgium
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National Physical Laboratory (NPL)
United Kingdom
Queen's Road
TW11 0LW Teddington
United Kingdom
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