Community Research and Development Information Service - CORDIS

FP5

NANOLITH

Project ID: IST-1999-11806
Funded under

ARRAYS OF MICROGUNS FOR PARALLEL E-BEAM NANOLITHOGRAPHY

From 2000-01-01 to 2003-06-30

Project details

Total cost:

EUR 2 647 667

EU contribution:

EUR 1 472 753

Coordinated in:

France

Funding scheme:

CSC - Cost-sharing contracts

Objective

Coordinator

THALES
France
45 Rue De Villiers
92200 Neuilly Sur Seine
France
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Administrative contact: Pierre LEGAGNEUX
Tel.: +33-01-69339144
Fax: +33-01-69330740
E-mail

Participants

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
3, RUE MICHEL-ANGE
75794 PARIS CEDEX 16
France
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Administrative contact: Binh VU THIEN
Tel.: +33-47-8580010
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
HANSASTRASSE 27C
80686 MUENCHEN
Germany
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Administrative contact: Detlef FRIEDRICH
Tel.: +48-21-174301
Fax: +48-21-174251
E-mail
THE CHANCELLOR, MASTERS AND SCHOLARS OF THE UNIVERSITY OF CAMBRIDGE
United Kingdom
The Old Schools, Trinity Lane
CB21TT CAMBRIDGE
United Kingdom
Administrative contact: William MILNE, (Head of Electrical Engineering)
Tel.: +44-1223-332757
Fax: +44-1223-766207
E-mail
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