Community Research and Development Information Service - CORDIS

FP5

A table-top xuv-laser for high-resolution optical lithography

Project ID: HPMF-CT-2000-00455
Funded under

A table-top xuv-laser for high-resolution optical lithography

From 2001-01-01 to 2002-12-31

Project details

Total cost:

EUR 140 900

EU contribution:

EUR 140 900

Coordinated in:

Netherlands

Topic(s):

Funding scheme:

RGI - Research grants (individual fellowships)

Coordinator

VRIJE UNIVERSITEIT AMSTERDAM - VERENIGING VOOR CHRISTELIJK WETENSCHAPPELIJK ONDERWIJS
Netherlands
1081,De Boelelaan 1081
1081 HV AMSTERDAM
Netherlands
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Administrative contact: Wim HOGERVORST
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