Community Research and Development Information Service - CORDIS

FP5

Rigorous diffraction theory for modeling of future lithography

Project ID: HPMF-CT-2000-00499
Funded under

Rigorous diffraction theory for modeling of future lithography

From 2000-09-01 to 2002-08-31

Project details

Total cost:

EUR 140 200

EU contribution:

EUR 140 200

Coordinated in:

Germany

Topic(s):

Funding scheme:

RGI - Research grants (individual fellowships)

Coordinator

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
Schottkystrasse 10
91058 ERLANGEN
Germany
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Administrative contact: Heiner RYSSEL
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