Community Research and Development Information Service - CORDIS

FP5

LICOTRENAS

Project ID: IST-1999-11751
Funded under

Lithography to Cross the One-Tenth of a micron Resolution Node using ArF System Technology

From 2000-01-01 to 2001-12-31

Project details

Total cost:

EUR 6 000 000

EU contribution:

EUR 3 000 000

Coordinated in:

Netherlands

Funding scheme:

CSC - Cost-sharing contracts

Objective

Coordinator

ASM LITHOGRAPHY B.V.
Netherlands
DE RUN 1110
5503 LA VELDHOVEN
Netherlands
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Administrative contact: Judon STOELDRAIJER
Tel.: +31-40-2303336
Fax: +31-40-2304550

Participants

CARL ZEISS
Germany
73446 OBERKOCHEN
Germany
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Administrative contact: Rainer BOERRET
Tel.: +73-64-204060
Fax: +73-64-204509
E-mail
HERAEUS QUARZGLAS GMBH & CO KG
Germany
QUARZSTRASSE
63450 HANAU
Germany
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Administrative contact: Bruno UEBBING
Tel.: +61-81-367435
Fax: +61-81-367448
E-mail
HONEYWELL SPECIALTY CHEMICALS SEELZE GMBH
Germany
WUNSTORFERSTRASSE 40
30926 SEELZE
Germany
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Administrative contact: Thomas SCHOLTEN
Tel.: +51-37-999317
Fax: +51-37-999827
E-mail
LAMBDA PHYSIK AG
Germany
HANS-BOECKLER-STRASSE 12
37073 GOETTINGEN
Germany
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Administrative contact: Uwe STAMM
Tel.: +55-16-938201
Fax: +55-16-8691
E-mail
SCHOTT LITHOTEC AG
Germany
OTTO-SCHOTT-STRASSE 13
07745 JENA
Germany
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Administrative contact: Ewald MOERSEN
Tel.: +61-31-8012614
Fax: +61-31-8012626
E-mail
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