Objective ALASCA2 aims at making an extensive investigation of the technical and lithographic performance of the first generation ASML PAS5500/900 193nm step-and-scan system for R&D and pilot production. Special attention will be given to the performance of the illumination system and the projection lens, and to the lifetime of optical components. The system will be assessed focusing on the 0.13 µm technology node, where 193 nm lithography may be inserted into semiconductor manufacturing. Fields of science natural sciencesphysical scienceselectromagnetism and electronicssemiconductivity Programme(s) FP5-IST - Programme for research, technological development and demonstration on a "User-friendly information society, 1998-2002" Topic(s) 1.1.2.-4.8.3 - Processes, equipment and materials Call for proposal Data not available Funding Scheme ACM - Preparatory, accompanying and support measures Coordinator INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW EU contribution No data Address KAPELDREEF 75 3001 LEUVEN Belgium See on map Total cost No data Participants (9) Sort alphabetically Sort by EU Contribution Expand all Collapse all ASM LITHOGRAPHY B.V. Netherlands EU contribution No data Address DE RUN 1110 5503 LA VELDHOVEN See on map Total cost No data CYPRESS SEMICONDUCTOR United States EU contribution No data Address 3901 N. FIRST STREET 95134 SAN JOSE See on map Total cost No data INFINEON TECHNOLOGIES AG Germany EU contribution No data Address ST. MARTIN STRASSE 53 81609 MUENCHEN See on map Total cost No data INTEL CORPORATION United States EU contribution No data Address MISSION COLLEGE BOULEVARD 2200 95052 SANTA CLARA CA See on map Total cost No data MICRON TECHNOLOGY INC. United States EU contribution No data Address 8000 SOUTH FEDERAL WAY 83707-0006 BOISE, IDAHO See on map Total cost No data MOTOROLA INC. United States EU contribution No data Address 3501 ED BLUESTEIN BOULEVARD 78721 AUSTIN - TEXAS See on map Total cost No data PHILIPS SEMICONDUCTORS B.V. Netherlands EU contribution No data Address PROFESSOR HOLSTLAAN 4 5656AA EINDHOVEN See on map Total cost No data SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC. Japan EU contribution No data Address 292 YOSHIDA-CHO, TOTSUKA-KU 244-0817 YOKOHAMA See on map Total cost No data TEXAS INSTRUMENTS INCORPORATED United States EU contribution No data Address FOREST LANE 8505 75266 DALLAS TX See on map Total cost No data
