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Programmable Digital Gyroscope of High Performance and Low Cost

Cel

The goal of PRODIGY is a programmable, high performance gyroscope with an accuracy better than 0,02 °/s and a price below 10 EURO.

Three selective measures will be applied:
1. New integrated MEMS technology based on DRIE and special SOI substrates
2. New design principles
3. New digital readout electronics.
One partner will implement the sensor into an advanced path prediction system, which will guarantee its immediate usability. Due to its high adaptability the gyroscope will be a key component for many products, e.g. in the fields of advanced automotive safety and comfort systems, people-to-device and people-to-people communication, virtual and augmented reality. To stay competitive with worldwide suppliers a joint European effort is necessary as proposed with the consortium consisting of a leading car manufacturer, Silicon foundry provider, supplier of silicon devices and systems, and an R&D institute with a well known gyro group.

Objectives:
The goal of PRODIGY is to develop a programmable, high performance gyroscope with an overall accuracy better than 0,02 °/s and a price below 10 EURO. The sensor will be implemented in an advanced path prediction system, which will contribute to resolving the problem of security and comfort of car drivers caused by the increasing traffic rate. Due to the high adaptability of the sensor many other applications are addressed, e.g. in the fields of virtual/augmented reality, people-to-people and people-to-device communication (gloves, helmets, mobile phones), robotics (home robots, autonomous guided vehicles), medicine (surgical instruments) and consumer. In addition PRODIGY will contribute to the overdue standardization for gyroscope specifications and enhance the European technology base by offering the MEMS technology in the framework of a foundry process.

Work description:
The distinguishing marks of the gyroscope will be based on three measures:
1) New MEMS process: The new technology (deep silicon etching with special SOI substrates) will allow a full CMOS compatibility and an integrated gyroscope will be realized. Further remarkable features are a thickness of 100 um of the layer containing the movable sensor structure and - due to the integrated technology - the avoidance of bondpads at the sensible, capacitive output of the sensor element. Thus the mechanical and electrical properties are improved. The process will be offered as foundry service with corresponding design rules.
2) New designs of the sensor structure: They feature a complete decoupling of the driven and the detection oscillation, which significantly reduces the dominant source of temperature drift, the so-called quadrature signal.
3) New digital readout concept: It is based on undersampling of carrier signals used for the capacitive readout. With a minimum of analog electronics the information can be digitised and processed by a DSP. Sophisticated signal manipulations can be done and the drift of electronic components is drastically reduced.

A programmable, highly flexible system is the result. Besides this PRODIGY will contribute significantly to the standardization of specifications for MEMS-gyroscopes in cooperation with respective bodies. To prove the usability of the gyroscope it will be implemented in a path prediction system for use in ADAS (Advanced Driver Assistant System). An in-vehicle evaluation will be performed. Due to the complex development planned in PRODIGY a strong consortium is required only found at European level. The consortium will consist of a leading car manufacturer (S), supplier of silicon devices and systems (B), Silicon foundry provider (D), and a R&D institute with a wellknown gyro group (D).

Milestones:
M1: (Milestone 1) Detailed specification and conceptual design of gyroscope and path prediction system.
M2: First sensor demonstrator (MEMS-die plus printed circuit board (PCB)).
M3: Second demonstrator (two dies plus a small PCB) meeting the specification.
M4: Prototypes (3 dies and 2 dies version/plastics and ceramics packaging).
M5: In-vehicle evaluation of path prediction system and integrated gyroscopes completed.

Zaproszenie do składania wniosków

Data not available

System finansowania

CSC - Cost-sharing contracts

Koordynator

HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE FORSCHUNG E.V.
Wkład UE
Brak danych
Adres
WILHELM-SCHICKARD-STRASSE 10
78052 VILLINGEN-SCHWENNINGEN
Niemcy

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Uczestnicy (3)