Objetivo The project aims to develop next generation capacitive MEMS components for precision applications. The industries directly targeted are MEMS sensor industry and test & measurement industry. In addition to generic MEMS process technology suitable to any capacitive sensor fabrication, the project intends to develop prototype components for high precision dc, low frequency and rf/microwave voltage and field measurements.OBJECTIVESThe project will open new application fields for the microsystem technology by improving the electromechanical stability of micromechanical capacitive transducers that are generic building blocks of Micro Electro Mechanical Systems (MEMS).The specific objectives are:1) To develop MEMS sensor technology for precision applications by improving the electromechanical stability of micromechanical capacitive transducers;2) To apply the technology in new types of electrical references for dc, low-frequency and high-frequency test and measurement applications;3) To analyse the potential of developed components and solutions in existing and novel industrial products and applications.DESCRIPTION OF WORK- Definition of target specifications for processes and components;-Definition of process requirements;- Analysis of instability components of present MEMS technology;- Development of MEMS process technology with improved properties for low frequency and high frequency applications. Design and fabrication of the new dc, low-frequency and high-frequency components (2 generations).Characterisation of the properties of the components using high-precision measurements. Exploitation plan for the process and component technology. Ámbito científico engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensors Programa(s) FP5-IST - Programme for research, technological development and demonstration on a "User-friendly information society, 1998-2002" Tema(s) Data not available Convocatoria de propuestas Data not available Régimen de financiación CSC - Cost-sharing contracts Coordinador VALTION TEKNILLINEN TUTKIMUSKESKUS (VTT) Aportación de la UE Sin datos Dirección VUORIMIEHENTIE 5 02044 ESPOO Finlandia Ver en el mapa Coste total Sin datos Participantes (6) Ordenar alfabéticamente Ordenar por aportación de la UE Ampliar todo Contraer todo CENTRE FOR METROLOGY AND ACCREDITATION Finlandia Aportación de la UE Sin datos Dirección LONNROTINKATU 37 00181 HELSINKI Ver en el mapa Coste total Sin datos FLUKE PRECISION MEASUREMENT LIMITED Reino Unido Aportación de la UE Sin datos Dirección 52 HURRICANE WAY, NORWICH AIRPORT NR6 6JB NORWICH, NORFOLK Ver en el mapa Coste total Sin datos NEDERLANDS MEETINSTITUUT B.V. Países Bajos Aportación de la UE Sin datos Dirección SCHOEMAKERSTRAAT 97 2600 AR DELFT Ver en el mapa Coste total Sin datos PHYSIKALISCH-TECHNISCHE BUNDESANSTALT Alemania Aportación de la UE Sin datos Dirección BUNDESALLEE 100 38116 BRAUNSCHWEIG Ver en el mapa Coste total Sin datos UNIVERSITEIT TWENTE Países Bajos Aportación de la UE Sin datos Dirección DRIENERLOLAAN 5 7522 NB ENSCHEDE Ver en el mapa Coste total Sin datos VTI TECHNOLOGIES OY Finlandia Aportación de la UE Sin datos Dirección MYLLYKIVENKUJA 6 01620 VANTAA Ver en el mapa Coste total Sin datos