Objective The objective of DREAMS is to assess the 300 mm EXPIDA 1250 SEM/AUGER defect review tool fabricated by Philips Electron Optics. From an already beta type existing tool the project will allow to bring to the global market a tool for Defect Review Analysis in a Manufacturing Environment. The tool offers unsurpassed initial first specifications on the SEM and spatial Auger resolution below 10nm. The main work in the project will concentrate in improving software, industrial reliability parameters and pushing the AUGER performances to its limits. A highly qualified Consortium: ST Microelectronics project Coordinator and node, PHILIPS SEMICONDUCTORS, INTERNATIONAL SEMATECH and IMEC thus 2 major Semiconductor Manufactures, a prestigious International Consortium and a worldwide recognised research Institute will guarantee the success of the assessment.Objectives:The main objective is to have by the end of the project a SEM/AUGER 300 mm compatible defect review tool that will succeed to be a must in the in line/at line characterisation and Defect Review Analysis in Semiconductor Manufacturer facilities. To achieve this goal besides assessing and improving the technical performances for measurements, all issues for total compatibility of the equipment with FAB facilities including reliability parameters and COO will be fully analysed and improved throughout the project duration. Technical performances will allow to have in the same tool a 3 nm optical imaging resolution with 10 nm lateral resolution chemical analysis via AES. The modifications an upgrade target a final equipment total compatible with SEMI/I300I standards, a friendly efficient software and parameters figures for MTBF, MTTR, downtime, set up time, service area, COO among the best for equipments installed in manufacturing facilities.Work description:With the objective to perform a full assessment and implement the necessary improvements in the SEM/AUGER EXPIDA 1250 from PHILIPS ELECTRON OPTICS DREAMS workplan is structured in three technical Workpackages and corresponding tasks:WP1 deals with the assembly of the equipment, shipment to the node site, installation and acceptance. The equipment will be installed in the 300 mm clean room characterisation area at ST Crolles and the initial specifications will be checked and the acceptance document issued.WP2 deals with the system assessment whose main objective is to arrive to the end of the project with an upgraded system fulfilling a set of final target specifications that will make the equipment a preferred tool for Defect Review Analysis in a Manufacturing environment.Task 2.1 is dedicated to full sample analysis with challenging samples provided by the ST, PHILIPS, INTERNATIONAL SEMATECH and IMEC from their most advance products fabricated in their CMOS processing lines. High spatial resolution of the Auger system will be fully used for high efficient spatial chemical analysis.Task 2.2 deals with the important action of response time to demands from the production Department. Average time of response will be determined and delays identified.Task 2.3 starting by mid project, define all the improvements requested by the partners from the experience gained in Tasks 2.1/2.2. PHILIPS ELECTRON OPTICS dedicates thereafter an important effort to implement these improvements. Software aspects will be the object of a particular effort.Task 2.4 is dedicated to upgrade the equipment to make it totally compatible with manufacturing facilities requirements taking into account the most important reliability parameters: e.g. MTBF, MTTR, downtime and those affecting the COO(e.g. throughput, clean room surface).WP3 is dedicated to the Dissemination actions and Implementation of the industrial exploitation plan.Milestones:M1: Factory acceptance protocol (MONTH 3)M2: Acceptance of initial set of specifications (MONTH 6)M3: A functional tool for DR characterization (MONTH 9)M4/M5: Definition of improvements specs/implementation (MONTH 10/16)M6: Optimisation of time to solve characterization problems (MONTH 16)M9: Equipment total compatible with manufacturing requirements (MONTH 18)M7/M8/M10: Dissemination actions & Exploitation plan (MONTH 3/ 9/18) Fields of science natural sciencescomputer and information sciencessoftwarenatural sciencesphysical sciencesopticsnatural sciencesphysical scienceselectromagnetism and electronicssemiconductivitynatural sciencesphysical scienceselectromagnetism and electronicsmicroelectronics Programme(s) FP5-IST - Programme for research, technological development and demonstration on a "User-friendly information society, 1998-2002" Topic(s) 2000-4.8.8 - Industrial microelectronic technologies: process, equipment -take-up Call for proposal Data not available Funding Scheme ACM - Preparatory, accompanying and support measures Coordinator STMICROELECTRONICS SA EU contribution No data Address 29 BOULEVARD ROMAIN ROLLAND 92120 MONTROUGE France See on map Total cost No data Participants (4) Sort alphabetically Sort by EU Contribution Expand all Collapse all FEI ELECTRON OPTICS B.V. Netherlands EU contribution No data Address ACHTSEWEG NOORD 5 5651 GG EINDHOVEN See on map Total cost No data INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW Belgium EU contribution No data Address KAPELDREEF 75 3001 LEUVEN See on map Total cost No data PHILIPS SEMICONDUCTORS B.V. Netherlands EU contribution No data Address PROFESSOR HOLSTLAAN 4 5656AA EINDHOVEN See on map Total cost No data SEMATECH, INC. United States EU contribution No data Address 2706 MONTOPOLIS DRIVE 78741-6499 AUSTIN - TEXAS See on map Total cost No data
