Community Research and Development Information Service - CORDIS

A new gas-jet method using electron-beam activation for a high-rate deposition of crystalline silicon films

From 2002-08-01 to 2004-07-31

Project details

Total cost:

Not available

EU contribution:

EUR 90 000

Coordinated in:

Belgium

Objective

Coordinator

Interuniversity Microelectronics Centre (IMEC)
Belgium
75 Kapeldreef
3001 Leven
Belgium
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Administrative contact: Johan NIJS
Tel.: +32-16-281284
Fax: +32-16-281501
E-mail

Participants

Crimean State Industrial-Pedagogical Institute
Ukraine
21 Sevastopolskaya street
95015 Simferopol
Ukraine
Administrative contact: Fevzi Yakubovich YAKUBOV
Tel.: +380-65-2249495
Fax: +380-65-2241506
E-mail
Siberian Branch of Russian Academy of Sciences
Russia
pr. Lavrentjeva 13
630090 Novosibirsk
Russia
Administrative contact: Olga Ivanovna SEMENOVA
Tel.: +7-383-2341733
Fax: +7-383-2332771
E-mail
Siberian Branch of Russian Academy of Sciences
Russia
1 Prospect Lavrentyev
630090 Novosibirsk
Russia
Administrative contact: Ravel Gazizovich SHARAFUTDINOV
Tel.: +7-383-2341451
Fax: +7-383-2343480
E-mail
Universität Hagen
Germany
182 Haldener Street
58084 Hagen
Germany
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Administrative contact: Wolfgang FAHRNER
Tel.: +49-233-1987378
Fax: +49-233-1987321
E-mail
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