Community Research and Development Information Service - CORDIS

IMPROVED TARGET MATERIAL FOR HIGH-YIELD SPUTTERING DEPOSITION OF HIGH QUALITY ITO FILMS WITH LOW RESISTIVITY AND HIGH OPTICAL TRANSMISSION

From 1993-01-01 to 1995-12-31

Project details

Total cost:

Not available

EU contribution:

EUR 1 100 000

Coordinated in:

France

Funding scheme:

CSC - Cost-sharing contracts

Objective

Coordinator

Métaleurop Recherche SA
France
1 avenue Albert Einstein
78193 Trappes
France
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Administrative contact: ALBERT
Tel.: +33-1-30662870
Fax: +33-1-30662728

Participants

DEGUSSA AG
Germany
RODENBACHER CHAUSSEE 4
6450 SIGURD HANAU
Germany
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Administrative contact: SCHLOTT
Tel.: +49-6181-593826
Fax: +49-6181-592005
LEYBOLD AG
Germany
SIEMENS STRAßE 100
8755 ALZENAU
Germany
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Administrative contact: KRETSCHMER
Tel.: +49-6023-396086
Fax: +49-6023-396070
SAINT GOBAIN
France
39 QUAI LUCIEN LEFRANC
93303 AUBERVILLIERS
France
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Administrative contact: LERBET
Tel.: +33-1-48395994
Fax: +33-1-48397416
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