Community Research and Development Information Service - CORDIS

FP6

SOCOT

Project ID: 16403
Funded under

Scatterometry Overlay Control Technology in the integrated circuit industry for the 32nm technology node and beyond

From 2005-10-01 to 2008-09-30

Project details

Total cost:

EUR 3 504 259

EU contribution:

EUR 1 813 683

Coordinated in:

Israel

Topic(s):

Funding scheme:

STREP - Specific Targeted Research Project

Objective

Coordinator

KLA-TENCOR CORPORATION (ISRAEL)
Israel
4 HATIKSHORET ST.
23100 MIGDAL HAEMEK
Israel
Administrative contact: Daniel KANDEL
Tel.: +97-24-6449640
Fax: +97-24-6449450
E-mail

Participants

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Belgium
KAPELDREEF 75
LEUVEN
Belgium
Administrative contact: Philippe LERAY
QWED SP. Z O.O.
Poland
UL.ZWYCIEZCOW 34 / 2
03-938 WARSAW
Poland
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Administrative contact: Malgorzata CELUCH
STMICROELECTRONICS S.R.L.
Italy
VIA OLIVETTI 2
20041 AGRATE BRIANZA
Italy
See on map
Administrative contact: Mauro VASCONI
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