NANOCMMProject ID: 26717
Universal and Flexible Coordinate Metrology for Micro and Nano Components Production
Total cost:EUR 9 727 241
EU contribution:EUR 5 499 875
Call for proposal:FP6-2004-NMP-NI-4See other projects for this call
Funding scheme:IP - Integrated Project
Metrology is essential at any stage of development and production. For conventional industries (e.g. automotive), classical coordinate measuring machines (CMMs) are flexible enough that they can be delivered off the shelf for most development and process control problems. In this project, the "CMM approach" shall be made applicable to micro- and nano-structures too. For this a Nano CMM shall be developed which is capable to measure real 3D (sub-) micrometre structures, including the today not measurable micrometric holes, undercuts, and gaps, all with 50-100nm accuracy.
Pursuing this, a number of technologies are still lacking: probes to localise points on objects with this accuracy; reference objects to calibrate Nano-CMMs; calibration facilities for nano-reference-objects, all 100 times more accurate than nowadays; specifications to purchase and to verify a machine; a means to measure inside holes with sub-micrometer radii, on steep slopes and behind obstructions; a changing capability for the probes; software suitable for feature extraction from measurements with changing probes; rules and standards concerning tolerances of nm features; concepts to find microscopic features (not breaking the probe); stable metrology frames to measure the same object with different probes in one coordinate system; concepts to estimate measurement uncertainties; and a means to inform potential users about the new technologies... this list is the work programme for the project.
The NANO-CMM project team comprises about 1/3 of Europe's nano and micro metrology research community, covering all required disciplines, particularly two manufacturers of Nano CMMs of the first generation (non real 3D ones) plus a group of end-users. This assures to achieve the critical mass to carry out the fundamental research, development, and implementations, and qualify staff through research, and a continuation of networking with partners and others after the project has ended.