Objective
Plasma processing technologies are based on radial-assisted ion-induced surface modifications where positive or negative ions accumulate energy within the sheath then strike the surface with certain energies and incidence angles. Due to the limited size of the treated electrodes the sheath is a two or three- dimensional structure. We have demonstrated very recently that the sheath forming to conducting electrodes that interface insulators exhibit very interesting focusing properties including the formation by discrete focusing of a passive surface (no charge impact) and the existence of some modal lines (modal focusing).
This charge kinetics is very attractive because the passive surface correlates the asymptotic distribution of the potential with a step function for the ion flux. The modal focusing effect is very sensitive to small changes in the sheath structure so it can be used to investigate sheath modifications by addition of electronegative gases, dust particles, etc. The aim of this project is to further investigate the phenomenology and propose new applications related to the plasma-sheath-lens focusing effects.
The central idea is that one can get on a small surface a unique pattern resulted by competition between sputtering (and/or) deposition, pattern that can be used as a fingerprint of the entire plasma-sheath-surface system. Our goal is to investigate in detail, by simulation and experiment, using a three- dimensional approach, both the sheath structure and charge-induced surface modifications.
The main aspects targeted include negative ion detection, improvement of ion dose uniformity in plasma immersed ion implantation, estimation of etching yields, ion beam extraction, plasma monitoring, negative sheath and Bohm criterion in multiple ion spices plasmas. We expect to be able to simulate and then realize customized plasma-sheath-lenses that address particular needs related to applications and basic understanding.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences theoretical physics particle physics particle accelerator
- natural sciences chemical sciences inorganic chemistry transition metals
- natural sciences mathematics pure mathematics geometry
- natural sciences chemical sciences inorganic chemistry metalloids
- natural sciences chemical sciences analytical chemistry mass spectrometry
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Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP6-2004-MOBILITY-12
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
IRG - Marie Curie actions-International re-integration grants
Coordinator
KGS. LYNGBY
Denmark
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.