Community Research and Development Information Service - CORDIS

Deep UV Lithography

From 1988-11-01 to 1991-10-31

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Netherlands

Objective

Coordinator

ASM LITHOGRAPHY
Netherlands
MEIERIJWEG 15, 8805
5503 HN VELDHOVEN
Netherlands
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Administrative contact: WITTEKOEK
Tel.: +31-40-580800
Fax: +31-40-580333

Participants

CARL ZEISS GMBH
Germany
CARL-ZEISS-STRAßE 4-54
73447 OBERKOCHEN
Germany
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Administrative contact: Gerhard ITTNER
Tel.: +49-7364-202768
Fax: +49-7364-204509
Commissariat à l'Energie Atomique (CEA)
France
Centre d'Études de Grenoble 17 avenue des Martyrs
38041 Grenoble
France
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Administrative contact: Jean-Charles GUIBERT
Tel.: +33-76883581
Fax: +33-76885183
FRAUNHOFER INSTITUT FÜR SILICATFORSCHUNG
Germany
LEONRODSTRAßE 54
80636 München
Germany
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Administrative contact: N/A
HOECHST AG
Germany
RHEINGAUSTRAßE 190-196
65203 WIESBADEN
Germany
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Administrative contact: BUHR
Tel.: +49-6121-688558
Fax: +49-6121-62485
NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
KASTANJELAAN, 1218
5600 MD EINDHOVEN
Netherlands
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Administrative contact: TOLNER
Tel.: +31-40-766223
Fax: +31-4O-766164
Siemens AG
Germany
Paul-Gossen-Straße 100
91052 Erlangen
Germany
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Administrative contact: Rainer LEUSCHNER
Tel.: +49-9131-731987
Fax: +49-9131-720230
Siemens AG
Germany
Balanstraße 73
81541 München
Germany
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Administrative contact: Wolfgang ARDEN
Tel.: +49-89-63646313
Fax: +49-89-63648666
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