Community Research and Development Information Service - CORDIS

Development of a Multichamber Batch Reactor for the Production of Multilayer Interpoly Dielectrics

From 1988-11-15 to 1993-11-14

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Netherlands

Objective

Coordinator

ADVANCED SEMICONDUCTOR MATERIALS INTERNATIONAL
Netherlands
REMBRANDTLAAN, 2A
3723 BJ BILTHOVEN
Netherlands
See on map
Administrative contact: KWAKMAN
Tel.: +31-30-298523
Fax: +31-30-293461

Participants

Commissariat à l'Energie Atomique (CEA)
France
Centre d'Études de Grenoble 17 avenue des Martyrs
38041 Grenoble
France
See on map
Administrative contact: Jean Pierre JOLY
Tel.: +33-76884557
Fax: +33-76-885183
Thomson Microelectronics Srl (SGS)
Italy
Via Carlo Olivetti
20041 Agrate Brianza Milano
Italy
Administrative contact: ALESSANDRI
Tel.: +39-6-555905
Fax: +39-6555233
Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top