Forschungs- & Entwicklungsinformationsdienst der Gemeinschaft - CORDIS

FP7

MD3

Project reference: 214948
Funded under

Material Development for Double exposure and Double patterning

From 2007-12-01 to 2009-11-30

Project details

Total cost:

EUR 4 684 221

EU contribution:

EUR 3 092 423

Coordinated in:

France

Call for proposal:

FP7-ICT-2007-1See other projects for this call

Funding scheme:

CP - Collaborative project (generic)

Objective

Related information

Open Access

Coordinator

COMMISSARIAT A L' ENERGIE ATOMIQUE
France

EU contribution: EUR 1 060 958


Rue des Martyrs 17
38054 Grenoble
France
Administrative contact: Marie-Laure PAGE
Tel.: +33-4-38782796
Fax: +33-4-38785183
E-mail

Participants

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V
Germany

EU contribution: EUR 407 158


HANSASTRASSE 27C
80686 MUENCHEN
Germany
Administrative contact: Andrea Zeumann
Tel.: +49-89-12052723
Fax: +49-89-12057534
E-mail
FORSCHUNGSVERBUND BERLIN E.V.
Germany

EU contribution: EUR 167 940


RUDOWER CHAUSSEE 17
12489 BERLIN
Germany
Administrative contact: MARGITTA TEUCHERT
Tel.: +49 30 20372594
Fax: +49 30 2044975
E-mail
STMICROELECTRONICS CROLLES 2 SAS
France

EU contribution: EUR 223 494


850 RUE JEAN MONNET
38920 CROLLES
France
Administrative contact: Dominique THOMAS
Tel.: +33476926327
Fax: +33476088133
E-mail
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France

EU contribution: EUR 149 123


3, RUE MICHEL-ANGE
75794 PARIS CEDEX 16
France
Administrative contact: Jean Xavier BOUCHERLE
Tel.: +33-4-76887924
Fax: +33-4-76881174
E-mail
ROHM AND HAAS FRANCE SAS
France

EU contribution: EUR 710 000


185 RUE DE BERCY
75012 PARIS
France
Administrative contact: CHRISTOPHE BRAULT
Tel.: +33-474924385
Fax: +33-474924405
E-mail
NATIONAL CENTRE FOR SCIENTIFIC RESEARCH DEMOKRITOS
Greece

EU contribution: EUR 373 750


PATRIARCHOU GREGORIOU STREET
15310 AGHIA PARASKEVI ATTIKIS
Greece
Administrative contact: Stella Martaki
Tel.: +30-210-6503037
Fax: +30-210-6522623
E-mail
Record Number: 85375 / Last updated on: 2016-04-11