Community Research and Development Information Service - CORDIS

High-Resolution Plasma Etching in Semiconductor Technology : Fundamentals, Processing and Equipment

From 1985-01-01 to 1989-01-01

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Germany

Objective

Coordinator

Fraunhofer-Gesellschaft zur Förderungder Angewandten Forschung e.V.
Germany
Dillenburgerstrasse
14199 Berlin
Germany
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Administrative contact: Hella SCHEER
Tel.: +49-30-82998111
Fax: +49-30-82998199

Participants

Johnson Matthey plc
United Kingdom
Orchard Road
SG8 5HE Royston
United Kingdom
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Administrative contact: WEBSTER
Tel.: +44-763-44161
Fax: +44-763-45014
LEYBOLD HERAEUS GMBH
Germany
SIEMENSSTRASSE 100
8755 ALZENAU
Germany
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Mono Light Instruments Ltd
United Kingdom
2-3 Waterside
KT15 2SN Weybridge
United Kingdom
Administrative contact: ANGUS
Tel.: +44-932-858566
Fax: +44-932-42959
United Kingdom Atomic Energy Authority (UKAEA)
United Kingdom
Harwell Laboratory
OX11 0RA Didcot
United Kingdom
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Administrative contact: SMAILES
Tel.: +44-235-24141
Fax: +44-235-832591
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