Community Research and Development Information Service - CORDIS

Advanced Mask and Reticle Technology for VLSI Sub-Micron Microelectronics Devices

From 1985-12-17 to 1988-12-17

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

United Kingdom

Objective

Coordinator

PLESSEY SEMICONDUCTORS
United Kingdom
FIELDS NEW ROAD
OL9 8NP CHADDERTON, OLDHAM
United Kingdom
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Administrative contact: TURNER
Tel.: +44-61-6240515
Fax: +44-61-6264946

Participants

BMP Plasmatechnologie
Germany
Carl-Zeiss-Straße 14
85748 Garching bei München
Germany
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Administrative contact: BELL
Tel.: +49-89-32205533
Fax: +49-
British Telecom plc (BT)
United Kingdom
British Telecom Laboratories Martlesham Heath
IP5 7RE Ipswich
United Kingdom
Administrative contact: JONES
Tel.: +44-473-643558
Fax: +44-473-642157
IMEC VZW
Belgium
KAPELDREEF
3030 HEVERLEE
Belgium
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Administrative contact: COOPMANS
Tel.: +32-16-281323
Fax: +32-16-229400
Siemens AG
Germany
Balanstraße 73
81541 München
Germany
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Administrative contact: Wilhelm POLLER
Tel.: +49-89-41442332
Fax: +49-89-41444694
Valvo Unternehmensbereich
Germany
Burchardstraße 19
20095 Hamburg
Germany
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Administrative contact: Dieter SAUTTER
Tel.: +49-40-3296220
Fax: +49-40-3296239
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