Community Research and Development Information Service - CORDIS

Ultrasensitive Impurity Analysis for Semiconductor Structures and Materials

From 1986-04-03 to 1990-10-03

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Belgium

Objective

Coordinator

IMEC VZW
Belgium
KAPELDREEF
3030 HEVERLEE
Belgium
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Administrative contact: Wilfried VANDERVORST
Tel.: +32-16-281211
Fax: +32-16-229400

Participants

Cameca
France
Boulevard Saint Denis 103
92403 Courbevoie
France
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Administrative contact: MIGEON
Tel.: +33-1-43343060
Fax: +33-
Philips Research Laboratories Ltd
United Kingdom
Cross Oak Lane
RH1 5HA Redhill
United Kingdom
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Administrative contact: CLEGG
Tel.: +44-293-785544
Fax: +44-293-776495
Siemens Nixdorf Informationssysteme AG
Germany
Otto-Hahn-Ring 6
81739 München
Germany
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Administrative contact: VAN CRIEGERN
Tel.: +49-89-2342692
Fax: +49-89-63648686
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