Community Research and Development Information Service - CORDIS

Automatic Control of an ASIC Fabrication Sequence as Demonstrated in the Plasma Etch Area

From 1987-04-01 to 1990-12-01

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

France

Objective

Coordinator

Bertin & Cie
France
15 rue Fredéric Joliot
13762 Les Milles
France
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Administrative contact: Gerard PELOUS
Tel.: +33-42604600
Fax: +33-42600013

Participants

European Silicon Structures SA
France
Zone Industrielle
13106 Rousset
France
Administrative contact: Eric DEMOULIN
Tel.: +33-42-33-4000
Fax: +33-42-33-4001
LEYBOLD HERAEUS GMBH
Germany
SIEMENSSTRASSE 100
8755 ALZENAU
Germany
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Administrative contact: N/A
MIETEC NV
Belgium
WESTERRING
9700 OUDENAARDE
Belgium
See on map
Administrative contact: Gust SCHOLS
Tel.: +32-55-332211
Fax: +32-55-318112
Plasma Technology Ltd
United Kingdom
North End Yatton
BS19 4AP Bristol
United Kingdom
Administrative contact: BALL
Tel.: +44-934-833851
Fax: +44-934-834918
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