Community Research and Development Information Service - CORDIS

Fast Reticle Equipment for Europe

From 1990-06-01 to 1992-03-31

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

France

Objective

Coordinator

EUROPEAN LITHOGRAPHY INNOVATION (ELISA)
France
1 PLACETTE DE LA MARJOLAINE
91440 BURES SUR YVETTE
France
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Administrative contact: Jacques PERROCHEAU
Tel.: +33-1-69280809
Fax: +33-1-69280870

Participants

Cambridge Instruments Ltd
United Kingdom
Rustat Road
CB1 3QH Cambridge
United Kingdom
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Administrative contact: Peter MITCHELL
Tel.: +44-223-411411
Fax: +44-223-210692
NATIONAL RESEARCH CENTRE FOR SCIENTIFIC RESEARCH DEMOKRITOS
Greece
AGHIA PARASKEVI, 60228
15310 ATHENES
Greece
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Administrative contact: Michael HATZAKIS
Tel.: +30-210-6533781
Fax: +30-210-6511723
TECHNISCHE UNIVERSITEIT DELFT
Netherlands
FELDMANNWEG 17, 5053
2600 GB DELFT
Netherlands
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Administrative contact: Johannes ROMIJN
Tel.: +31-15-786009
Fax: +31-15-783122
Thomson Microelectronics Srl (SGS)
Italy
Via Carlo Olivetti
20041 Agrate Brianza Milano
Italy
UNIVERSITY OF CAMBRIDGE
United Kingdom
MADINGLEY ROAD
CB3 0ES CAMBRIDGE
United Kingdom
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Administrative contact: Haroon AHMED
Tel.: +44-223-337557
Fax: +44-223-337706
Valvo Unternehmensbereich
Germany
Burchardstraße 19
20095 Hamburg
Germany
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Administrative contact: Manfred HERRMANN
Tel.: +49-40-3296172
Fax: +49-40-3296239
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