Community Research and Development Information Service - CORDIS

New-Generation DUV-Stepper Optics

From 1990-01-01 to 1992-12-31

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Germany

Objective

Coordinator

CARL ZEISS GMBH
Germany
CARL-ZEISS-STRAßE 4-54
73447 OBERKOCHEN
Germany
See on map
Administrative contact: OSWALD
Tel.: +49-7364-203141
Fax: +49-7364-6808

Participants

ASM LITHOGRAPHY
Netherlands
MEIERIJWEG 15, 8805
5503 HN VELDHOVEN
Netherlands
See on map
Administrative contact: N/A
HERAEUS QUARZSCHMELZE
Germany
QUARZSTRAßE 8
63450 HANAU
Germany
See on map
Administrative contact: N/A
Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top