Project description
Micro/nanosystems
NEMSIC addresses the future intelligent sensor and actuator systems in which solid-state semiconductor micro/nanodevices and micro/nano-mechanical devices are co-integrated for new functionalities and increased performance.The project proposes the exploration and development of low power sensing micro/nanosystems based on Nano-Electro-Mechanical (NEM) structures integrated on a Silicon-On-Insulator (SOI) or Silicon-On-Nothing (SON) technological platform. The applications that drive the technological NEM-based smart system demonstrators are gas (COx, NOx, SOx) and biological sensing (DNA, proteins and other molecules), dedicated to critical environment monitoring and applications in the fields of genetics, pharmacology and drug discovery. NEM technology will be combined with silicon CMOS technology involving novelty and scientific/technical challenges at three levels: (i) system level, addressing the challenge of true nano-micro interfaces, where signals detected by arrays of nanostructures are processed by smartly designed low power CMOS circuitry, (ii) device level, where novel true hybrid NEM-FET devices support new highly sensitive detection scheme and power management via sleep switches and (iii) technology level, where nanotechnology processes (top down processed nanobeams and nanogaps, featuring sub-100nm dimensions) will be developed and combined with advanced functionalization techniques for dedicated sensing that stays compatible with CMOS in future IC-embedded or post-IC approaches. The reliability of the NEM structures, combined with prospects for 0-level packaging are studied as key challenges for the success of such Nano-electro-mechanical-system-integrated-circuits (NEMSIC).Finally, NEMSIC is expected to provide the end-users with flexible design methodologies based on advanced but well-controlled SOI or SON technology platforms, with predictable performances and associated cost effectiveness.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
- natural sciences biological sciences genetics DNA
- engineering and technology environmental engineering energy and fuels fossil energy natural gas
- engineering and technology nanotechnology nanoelectromechanical systems
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP7-ICT-2007-2
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
1015 Lausanne
Switzerland
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.