Community Research and Development Information Service - CORDIS

Development of an Advanced Diagnostic System for Sub-PPT Metal Contamination in Silicon Wafer Manufacturing and Processing

From 1992-05-27 to 1995-05-26

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Italy

Objective

Coordinator

Memc Materiali Elettronici SpA
Italy
Viale Gherzi 31
28100 Novara
Italy
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Administrative contact: Robert FALSTER
Tel.: +39-321-442394
Fax: +39-321-490041

Participants

Commissariat à l'Energie Atomique (CEA)
France
Centre d'Études de Grenoble 17 avenue des Martyrs
38041 Grenoble
France
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Administrative contact: Jean Pierre JOLY
Tel.: +33-76884557
Fax: +33-76-885183
GESELLSCHAFT FÜR MESSTECHNIK AND TECHNOLOGIE
Germany
GERETSRIEDER STRAßE, 10A
81379 München
Germany
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Administrative contact: Peter EICHINGER
Tel.: +49-89-788868
Fax: +49-89-784369
E-mail
Thomson Microelectronics Srl (SGS)
Italy
Via Carlo Olivetti
20041 Agrate Brianza Milano
Italy
Administrative contact: Claudio SAVOIA
Tel.: +39-39-6035592
Fax: +39-39-6035820
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