Community Research and Development Information Service - CORDIS

FP5

OCMFMEMSM

Project ID: HPMF-CT-2002-00007
Funded under

Optical characterisation methods for micro-electro- mechanical systems manufacturing: implementing and calibration of an in situ integrated technique

From 2000-10-01 to 2012-09-30

Project details

Total cost:

EUR 0

EU contribution:

EUR 0

Coordinated in:

France

Topic(s):

Call for proposal:

IHP-MCIF-99-1See other projects for this call

Objective

Coordinator

UNIVERSIT_ DE FRANCHE-COMT_
France
Rue Goudimel
BESAN_ON
France
Administrative contact: Christophe GORECKI
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