Community Research and Development Information Service - CORDIS

FP7 Semiconductor Equipment Assessment

SEAL

Project reference: 257379
Funded under: FP7-ICT

Semiconductor Equipment Assessment Leveraging Innovation [Print to PDF] [Print to RTF]

From 2010-06-01 to 2013-09-30

Project details

Total cost:

EUR 14 059 075

EU contribution:

EUR 9 099 955

Coordinated in:

Germany

Call for proposal:

FP7-ICT-2009-5

Funding scheme:

CP - Collaborative project (generic)

Seal is an EC-funded project covering semiconductor equipment assessment to strengthen the European semiconductor equipment industry.

SEAL is an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects. For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall, SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

Objective

SEAL is a project for an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects.For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall, SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

Related information

Coordinator contact

Lothar Pfizner
E-mail

Coordinator

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V
Germany
Hansastrasse 27C
MUENCHEN, Germany
Administrative contact: Andrea Zeumann
Tel.: +49 89 12052327
Fax: +49 89 1205772723
E-mail

Participants

FACHHOCHSCHULE WIENER NEUSTADT FUR WIRTSCHAFT UND TECHNIK GMBH
Austria
JOHANNES GUTENBERGSTRASSE
WIENER NEUSTADT, Austria
Administrative contact: Helmut Pfeffer
Tel.: +43262289084116
Fax: +43262289084141
E-mail
AMS AG
Austria
TOBELBADERSTRASSE
UNTERPREMSTAETTEN, Austria
Administrative contact: Yasmine Pree
Tel.: +4331365005474
E-mail
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Belgium
Kapeldreef
LEUVEN, Belgium
Administrative contact: Christine Van Houtven
Tel.: +3216281613
Fax: +3216281812
E-mail
SUSS MICROOPTICS SA
Switzerland
RUE JAQUET DROZ
NEUCHATEL, Switzerland
Administrative contact: Kristina Schulz
Tel.: +41327205104
Fax: +41327205713
E-mail
Reinhardt Microtech AG
Switzerland
Aeulistrasse
Wangs, Switzerland
Administrative contact: Wolfgang Tschanun
Tel.: +41 817200456
Fax: +41 81 720 04 50
E-mail
INFINEON TECHNOLOGIES AG
Germany
Am Campeon 1-12
Neubiberg, Germany
Administrative contact: Bernhard Scholz
Tel.: +49 89 234 22339
Fax: +49 89 234 955 0395
E-mail
SUSS MicroTec Lithography GmbH
Germany
SCHLEISSHEIMER STRASSE
GARCHING, Germany
Administrative contact: Susanne Mölter
Tel.: +49 89 32007109
Fax: +49 89 32007162
E-mail
Fries Research & Technology GmbH
Germany
Friedrich-Ebert-Straße
Bergisch Gladbach, Germany
Administrative contact: Thomas Fries
Tel.: +492204842430
Fax: +492204842431
E-mail
HQ-Dielectrics GmbH
Germany
Dornstadter Weg
Dornstadt, Germany
Administrative contact: Alexander Gschwandtner
Tel.: +491728338658
Fax: +497348204928
E-mail
ICT Integrated Circuit Testing GmbH
Germany
Ammerthalstrasse
Heimstetten, Germany
Administrative contact: Marc Gurman
Tel.: +498990999467
Fax: +498990999429
E-mail
NANDA TECHNOLOGIES GMBH
Germany
Lise-Meitner-Strasse
Unterschleissheim, Germany
Administrative contact: Johannes von Borries
Tel.: +49 89 4523558 21
Fax: +49 89 4523558 70
E-mail
Oxford Instruments GmbH
Germany
Otto-von-Guericke Ring
Wiesbaden, Germany
Administrative contact: Rune Gehrlein
Tel.: +496122937156
Fax: +496122937178
E-mail
Protec Carrier Systems GmbH
Germany
Birlenbacher Strasse
Siegen, Germany
Administrative contact: Sebastian Wagner
Tel.: +49 271 8904116
Fax: +49 271 8904119
E-mail
PVA TEPLA ANALYTICAL SYSTEMS GMBH
Germany
Gartenstrasse
Aalen, Germany
Administrative contact: Peter Czurratis
Tel.: +4973613765230
Fax: +49736137652313
E-mail
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Germany
Wilschdorfer Landstrasse
Dresden, Germany
Administrative contact: Petra Hetzer
Tel.: +49 351 2774514
Fax: +49 351 277 9 4514
E-mail
SILTRONIC AG
Germany
HANNS-SIEDEL-PLATZ
MUENCHEN, Germany
Administrative contact: Thomas Renner
Tel.: +498985643230
Fax: +498985643239
E-mail
Jenoptik Automatisierungstechnik GmbH
Germany
Konrad-Zuse-Strasse
Jena, Germany
Administrative contact: Hans-Ulrich Zuehlke
Tel.: +49 3641 653890
Fax: +49 3641 65 13 3890
E-mail
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Germany
Ferdinand-von-Steinbeis-Ring
Sternenfels, Germany
Administrative contact: Peter Dreß
Tel.: +49704541235
Fax: +49704541239
E-mail
ACP - ADVANCED CLEAN PRODUCTION GMBH
Germany
RONTGENSTRASSE
ESSLINGEN, Germany
Administrative contact: Josef Gentischer
Tel.: +49715179068
E-mail
FUNDACIO PRIVADA INSTITUT CATALA DE NANOTECNOLOGIA
Spain
CAMPUS DE LA UAB EDIFICI CM7
BELLATERRA (BARCELONA), Spain
Administrative contact: Stella Veciana
Tel.: +34 935813840
Fax: +34 935814747
E-mail
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
RUE LEBLANC
PARIS 15, France
Administrative contact: Marie-Laure Page
Tel.: +33 4 38782796
Fax: +33 4 38785183
E-mail
ION BEAM SERVICES
France
RUE GASTON IMBERT PROLONGEE
ROUSSET, France
Administrative contact: Frank TORREGROSA
Tel.: +33 4 42 53 89 64
Fax: +33 4 42 53 89 59
E-mail
STMICROELECTRONICS CROLLES 2 SAS
France
RUE JEAN MONNET 850
CROLLES, France
Administrative contact: Dominique Goubier
Tel.: +33 4 38 92 34 11
Fax: +00 0 000000 00 00
E-mail
ADIXEN VACUUM PRODUCTS SAS
France
AVENUE DE BROGNY
ANNECY, France
Administrative contact: JACQUES DE SAINT TRIVIER
Tel.: +33 4 50657949
Fax: +33 4 50465065
E-mail
TOPPAN PHOTOMASKS FRANCE SAS
France
ROUSSET PARC CLUB, AVENUE FRANCIS PERRIN
ROUSSET, France
Administrative contact: MICHEL TISSIER
Tel.: +33674648580
Fax: +3342290493
E-mail
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary
PRIELLE KORNELIA UTCA
BUDAPEST, Hungary
Administrative contact: Anita Farkasinszki
Tel.: +36 1 382 4530
Fax: +36 1 382 4532
E-mail
KLA-TENCOR CORPORATION (ISRAEL)
Israel
HATIKSHORET ST.
MIGDAL HAEMEK, Israel
Administrative contact: Daniel Kandel
Tel.: +972 46449449
Fax: +972 46449450
E-mail
APPLIED MATERIALS ISRAEL LTD
Israel
OPPENHEIMER
REHOVOT, Israel
Administrative contact: Yoram Uziel
Tel.: +97289499915
Fax: +97289486269
E-mail
MICRON SEMICONDUCTOR ITALIA SRL
Italy
VIA CAMILLO OLIVETTI
AGRATE BRIANZA, Italy
Administrative contact: MANUELA SEMINARA
Tel.: +39 039 603 6669
Fax: +39 039 603 2777
E-mail
MEMC ELECTRONIC MATERIALS SPA
Italy
VIALE GHERZI
NOVARA, Italy
Administrative contact: Fabrizio Viker
Tel.: +390321334471
Fax: +390321691000
E-mail
MAPPER LITHOGRAPHY B.V.
Netherlands
COMPUTERLAAN 15
DELFT, Netherlands
Administrative contact: Bert Jan Kampherbeek
Tel.: +31158880262
Fax: +31158880262
E-mail
Metryx Ltd
United Kingdom
Unit 2 A, MANOR PARK, Nailsea Wall Lane
Nailsea, United Kingdom
Administrative contact: Mark Berry
Tel.: +441275859988
Fax: +441275866112
E-mail
Intel Corporation
United States
ORANGE STREET
WILMINGTON NEW CASTLE DE, United States
Administrative contact: Gilroy Vandentop
Tel.: +1 971 214 3331
Fax: +1 503 613 7997
E-mail
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK
United States
STATE STREET
ALBANY NY, United States
Administrative contact: Michael Liehr
Tel.: +1 518 441 7816
Fax: +1 518 441 7816
E-mail
Record Number: 95776 / Last updated on: 2014-10-27